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Nov 30, 2024
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ECE 4370 - Microelectromechanical Systems 3 Credits (3 Contact Hours)
Introduction to the basic materials in current microelectromechanical systems (MEMS), as well as the fundamental sensing and actuation mechanisms therein. Students also learn the basic fabrication techniques for bulk and surface micromachining, discuss the primary forces in MEMS devices, and study the basic micro mechanical structures and microfluidics. Preq: CH 1020 and PHYS 1220 ; and senior standing.
This 4000-level course has a 6000-level counterpart. Students should refer to the Graduate Announcements for the 6000-level description and requirements.
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