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Nov 27, 2024
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ME 6580 - Fundamentals of Micro/Nano Fabrication3 Credits (3 Contact Hours)
Fundamental principles behind micro and nano manufacturing processes used in MEMS, bioMEMS and related fields. Overviews cleanroom environments and materials used in the field. Details the physical and chemical aspects of photolithography, next generation lithography dry and wet etching, and physical and chemical vapor deposition. Includes a lab section to reinforce knowledge acquired during lectures.
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