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Dec 04, 2024
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ME 4580 - Fundamentals of Micro/Nano Fabrication 3 Credits (3 Contact Hours)
Fundamental principles behind micro and nano manufacturing processes used in MEMS, bioMEMS and related fields. Overviews cleanroom environments and materials used in the field. Details the physical and chemical aspects of photolithography, next generation lithography dry and wet etching, and physical and chemical vapor deposition. Includes a lab section to reinforce knowledge acquired during lectures. Preq: ME 3120 .
This 4000-level course has a 6000-level counterpart. Students should refer to the Graduate Catalog for the 6000-level description and requirements.
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